A Framework to Calibrate the Scanning Electron Microscope Under Variational Magnifications

Xingjian Liu, Zhongwei LI*, Pedro Miraldo, Kai Zhong and Yusheng Shi. "A Framework to Calibrate the Scanning Electron Microscope Under Variational Magnifications" in IEEE Photonics Tecedrohnology Letters, vol. 28, no. 16, pp. 1715-1718, Aug.15, 15 2016.


Abstract:

We propose and demonstrate a new and effective framework to calibrate the scanning electron microscope (SEM), under variational magnifications from 20 to 500. Unlike previous approaches that required different models and calibration procedures for different magnifications, this framework regards the SEM as a black box. The general imaging model is first introduced in modeling the SEM system, to explore the nature of SEM imaging. In order to relax the complexity of the general imaging model and calibration process, the smooth general imaging model and a linear point-based calibration method are developed. The experimental results well agree with the theoretical predication and show great potential to realize SEM calibration.